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Imec Demonstrates World First III-V FinFET Devices Monolithically Integrated on 300mm Silicon Wafers

Achievement marks step towards monolithic heterogeneous integration and non-silicon devices

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By: DAVID SAVASTANO

Editor, Ink World Magazine

Imec announced that it has successfully demonstrated the first III-V compound semiconductor FinFET devices integrated epitaxially on 300mm silicon wafers, through a unique silicon fin replacement process. The achievement illustrates progress toward 300mm and future 450mm high-volume wafer manufacturing of advanced heterogeneous CMOS devices, monolithically integrating high-density compound semiconductors on silicon. The breakthrough not only enables continual CMOS scaling down to 7nm and bel...

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